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Absolute reflectance accessories

Abolute Reflectance Measurement
 

JASCO is a leading manfacturer of reflectance measurement systems resulting from collaborations with many leading film and semi-conductor manufacturers.

Three instruments include

  • Manual synchronous system
  • Manual asynchronous system
  • Automatic asynchronous system

The absolute reflectance measurement system performs the measurement of spectral properties for  film thickness, angle variation or other characteristics of solid samples such as semiconductors, thin films and various optical elements.

Synchronous Absolute Reflectance Accessory Manual Operation

The Models ARV-913/ARN-914/ARN-915i are designed to measure the absolute reflectance of a specularly reflecting sample and the relative reflectance of a diffuse reflecting sample. It also permits the measurement of transmittance by using an optional solid sample holder for transmittance measurement.
This attachment has an integrating sphere with detector. The angle of incidence of the sample is changed by moving the integrating sphere (in the measurement of absolute reflectance). The movable angular range of the integrating sphere is 5deg to 60deg (angle of incidence). Relative reflectance is measured by mounting the sample on the rear of the integrating sphere to which the detector is attached.

ARV-913  Absolute reflectance measurement accessory for V-750/760  (UV-Vis, Synchronous)
ARN-914  Absolute reflectance measurement accessory for V-770  (UV-Vis/NIR, Synchronous)
ARN-915i Absolute reflectance measurement accessory for V-780 (UV-Vis/NIR, Synchronous)

Specifications

Wavelength range                                                                        250 - 850 nm (Model ARV-913)
                                                                                                      250 - 2000 nm (Model ARN-914)
                                                                                                      250 - 1600 nm (Model ARN-915i)

Angle of incidence Absolute
reflectance measurement:                                                                                       5- 60deg.

Relative reflectance measurement:                                                         Vertical incidence
                                                                                                                         Setting of angle of incidence 2.5deg.

Sample size - Absolute reflectance measuring holder                        Minimum 20 mm (height) deg. 20 mm (width) deg. 1 mm (depth)
                                                                                                                         Maximum 70 mm (height) deg. 100 mm (width) deg. 10 mm (depth)

Sample Size - Relative reflectance measuring holder                         Minimum 20 mm (height) deg. 20 mm (width) deg. 0.5 mm (depth)
                                                                                                                         Maximum 70 mm (height) deg. 100 mm (width) deg. 10 mm (depth)

Light beam - Position of
absolutereflectance measuring window                          10 mm (height) deg. 3 mm (width)

Light beam - Position of relative
reflectance measuring window                                          10 mm (height) deg. 3 mm (width)

Detector 60 mm-dia. integrating sphere
  Photomultiplier  tube
  (Model ARV-913/ARN-914/ARN-915i)
  PbS  photoconductive cell (Model ARN-914)
InGaAs detector (Model ARN-915i

                                                          
                                                                                                                                                                              
Bandwidth                                                                                                                   UV: 5 nm
                                                                                                                                   NIR: 20 nm

 

     

Asynchronous Absolute Reflectance Measurement Manual Operation

The Model ARSV-916/ARSN-917/ARSN/918i manual stage for measuring the absolute reflectance and transmittance of a sample that does not diffuse light. The detector is equipped with an integrating sphere and thus it also permits measurement of the relative reflectance and transmittance of samples that do diffuse light (the sample holder for measurement of relative reflectance is standard, but the sample holder for measurement of transmittance is an option).
Absolute reflectance and transmittance are measured by rotating the sample stage to determine the angle of the light incident upon the sample and independently setting the detector in the path of the reflected light or the transmitted light through the sample. The relative reflectance is measured with light normally incident on the sample, which is set behind the integrating sphere.

ARSV-916  Absolute reflectance measurement accessory for V-750/760  (UV-Vis, Asynchronous)
ARSN-917  Absolute reflectance measurement accessory for V-770  (UV-Vis/NIR, Asynchronous)
ARSN-918i  Absolute reflectance measurement accessory for V-780  (UV-Vis/NIR, Asynchronous)

Specifications

 

Wavelength range

250 - 850 nm (Model ARSV-916)
 

 

250 - 2000 nm (Model ARSN-917)

 

Angle of incidence

250 - 1600 nm (Model ARSN-918i)

Absolute reflectance measurement: 5 - 60deg.

 

Transmittance measurement: 0 - 60deg.

 

Relative reflectance measurement: Vertical incidence

Setting of angle
of incidence

Sample stage:   0.1deg.
Detector stage:  1deg.

Sample size

Absolute reflectance measuring holder

 

Minimum 20 mm (height) x 20 mm (width) x 1 mm (depth)

 

Maximum 70 mm (height) x 100 mm (width) x 10 mm (depth)

 

Relative reflectance measuring holder

 

Minimum 20 mm (height) x 20 mm (width) x 0.5 mm (depth) 

 

Maximum 70 mm (height) x 100 mm (width) x 10 mm (depth)

Light beam

Position of absolute reflectance measuring window - Various

Detector 

 60 mm-dia. integrating sphere

 

Photomultiplier tube (Model ARSV-916/ARSN-917/ARSN-918i)

 

 

PbS photoconductive cell (Model ARSN-917)

InGaAs detector (Model ARSN-918i)

 Bandwidth 

UV: 5 nm NIR: 20 nm

 

 

Asynchronous Absolute Reflectance Measurement Automatic Operation

The absolute reflectance measurement system automates the measurement of the spectral properties, film thickness, angle variation or other characteristics of solid samples such as semiconductors, thin films and various optical elements. Coupled with  the JASCO V-Series UV-Vis/NIR Spectrophotometers, the instrument provides  measurements of challenging samples with dramatically reduced noise and excellent  photometric stability. The incidence and collection angles can be set in a synchronous  mode,  simultaneously rotating the sample stage and integrating sphere. Alternatively, the  incidence and collection angles can be individually declared in an asynchronous mode. The polarization properties of a sample can also be examined using P or S polarization or by setting the desired polarization angles.


ARMV-919 Automated absolute reflectance measurement accessory for V-750/-760 (UV/VIS)
ARMN-920 Automated absolute reflectance measurement accessory for V-770 (UV/VIS/NIR)
ARMN-921i Automated absolute reflectance measurement accessory for V-780 (UV/VIS/NIR)


  

Optional Accessories
 
ARG-476/GPH-506 Polarizer (Glan-Taylor prism)


Light from a spectrophotometer that employs a grating is always polarized. The ratio of the intensities of the S polarized light and the P polarized light varies according to the wavelength and also differs from one grating to another for the same wavelength. The greater the angle of incidence of the beam on the sample, the greater the difference in the intensity of the S polarized reflected light and the P polarized reflected light, making measurement inaccurate if the absolute reflectance is measured at a high angle of incidence. In such a case, the polarizer can be set to 45 degrees so that the incident light can be considered non-polarized. 

A polarizer is required to accurately measure the absolute reflectance when the angle of incidence of 30 deg. or greater.

SSH-508 Solid Sample Holder

This attachment is used to measure the transmittance of a sample that diffuses light

   
     
     


Transmittance profile of band pass filter

Varying the incidence angle, the transmittance characteristics of a band pass filter are measured. As shown above, the transmittance peak of the band pass filter is shifted about 8 nm to a shorter wavelength range as the incident angle is changed from 0 to 10 degrees.


Reflectance profile of dichroic mirror

Varying the incidence angle, the reflectance characteristics of a dichroic mirror using P and S polarization are measured.


Phase difference measurement

By using an angle selective polarizer, measurements of the phase difference of metal films can be provided. Quarter wave plates for evaluation of optical disks can also be inspected.

1. Phase difference (δ) of Al mirror
2. Phase difference (δ) of a sample and Al mirror
3. Phase difference (δ) of a sample

 

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